Oxygen flow rate effect on copper oxide thin films deposited by radio frequency magnetron sputtering

Title
Oxygen flow rate effect on copper oxide thin films deposited by radio frequency magnetron sputtering
Authors
Keywords
Thin films, Copper oxides, Reactive magnetron sputtering, Optical emission spectrometry
Journal
THIN SOLID FILMS
Volume 741, Issue -, Pages 139013
Publisher
Elsevier BV
Online
2021-11-20
DOI
10.1016/j.tsf.2021.139013

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