Oxygen flow rate effect on copper oxide thin films deposited by radio frequency magnetron sputtering
出版年份 2021 全文链接
标题
Oxygen flow rate effect on copper oxide thin films deposited by radio frequency magnetron sputtering
作者
关键词
Thin films, Copper oxides, Reactive magnetron sputtering, Optical emission spectrometry
出版物
THIN SOLID FILMS
Volume 741, Issue -, Pages 139013
出版商
Elsevier BV
发表日期
2021-11-20
DOI
10.1016/j.tsf.2021.139013
参考文献
相关参考文献
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