Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope

Title
Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope
Authors
Keywords
Sapphire, C-plane, Nanoscratch, Anisotropy, Slip/twinning system
Publisher
Elsevier BV
Online
2021-08-23
DOI
10.1016/j.precisioneng.2021.08.011

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