Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope

标题
Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope
作者
关键词
Sapphire, C-plane, Nanoscratch, Anisotropy, Slip/twinning system
出版商
Elsevier BV
发表日期
2021-08-23
DOI
10.1016/j.precisioneng.2021.08.011

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