Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges

Published 2021 View Full Article

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Title
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 39, Issue 6, Pages 063004
Publisher
American Vacuum Society
Online
2021-10-26
DOI
10.1116/6.0001327

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