Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges

标题
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 39, Issue 6, Pages 063004
出版商
American Vacuum Society
发表日期
2021-10-26
DOI
10.1116/6.0001327

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