Effect of the Si/Ti Ratio on the Structure and Mechanical Properties of Plasma-Enhanced Magnetron Sputtered TiSiCN Coatings
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Title
Effect of the Si/Ti Ratio on the Structure and Mechanical Properties of Plasma-Enhanced Magnetron Sputtered TiSiCN Coatings
Authors
Keywords
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Journal
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2022-01-21
DOI
10.1007/s11665-021-06504-7
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