Growth temperature effect on physical and mechanical properties of nitrogen rich InN epilayers

Title
Growth temperature effect on physical and mechanical properties of nitrogen rich InN epilayers
Authors
Keywords
InN, Growth temperature, Surface morphology, Dislocation density, Compressive residual stresses, Nanoindentation
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 885, Issue -, Pages 160951
Publisher
Elsevier BV
Online
2021-06-25
DOI
10.1016/j.jallcom.2021.160951

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