Magnetron co-sputtering optimized aluminum-doped zinc oxide (AZO) film for high-response formaldehyde sensing
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Title
Magnetron co-sputtering optimized aluminum-doped zinc oxide (AZO) film for high-response formaldehyde sensing
Authors
Keywords
Aluminum-doped zinc oxide (AZO), Thin film, Formaldehyde, Magnetron co-sputtering, Response
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 880, Issue -, Pages 160510
Publisher
Elsevier BV
Online
2021-05-24
DOI
10.1016/j.jallcom.2021.160510
References
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