Topology optimization of MEMS resonators with target eigenfrequencies and modes

Title
Topology optimization of MEMS resonators with target eigenfrequencies and modes
Authors
Keywords
Topology optimization, MEMS resonators, Target eigenfrequencies, Reduced order models, Minimum length scale, Method of moving asymptotes
Journal
EUROPEAN JOURNAL OF MECHANICS A-SOLIDS
Volume 91, Issue -, Pages 104352
Publisher
Elsevier BV
Online
2021-07-16
DOI
10.1016/j.euromechsol.2021.104352

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