Improving the thermoelectric properties of thick Sb2Te3 film via Cu doping and annealing deposited by DC magnetron sputtering using a mosaic target
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Title
Improving the thermoelectric properties of thick Sb2Te3 film via Cu doping and annealing deposited by DC magnetron sputtering using a mosaic target
Authors
Keywords
Antimony telluride, Thick film, Cu-doped, Thermoelectric, Mosaic target
Journal
CURRENT APPLIED PHYSICS
Volume 31, Issue -, Pages 7-15
Publisher
Elsevier BV
Online
2021-07-18
DOI
10.1016/j.cap.2021.07.011
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