Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
Published 2021 View Full Article
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Title
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
Authors
Keywords
Mode localization, Accelerometer, Electrostatic coupling, Nonlinear dynamics, Multiple scales method
Journal
Communications in Nonlinear Science and Numerical Simulation
Volume 103, Issue -, Pages 105960
Publisher
Elsevier BV
Online
2021-07-10
DOI
10.1016/j.cnsns.2021.105960
References
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