Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

Title
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
Authors
Keywords
Mode localization, Accelerometer, Electrostatic coupling, Nonlinear dynamics, Multiple scales method
Journal
Publisher
Elsevier BV
Online
2021-07-10
DOI
10.1016/j.cnsns.2021.105960

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