Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
出版年份 2021 全文链接
标题
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
作者
关键词
Mode localization, Accelerometer, Electrostatic coupling, Nonlinear dynamics, Multiple scales method
出版物
Communications in Nonlinear Science and Numerical Simulation
Volume 103, Issue -, Pages 105960
出版商
Elsevier BV
发表日期
2021-07-10
DOI
10.1016/j.cnsns.2021.105960
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators
- (2020) Ming Lyu et al. INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
- Theoretical and experimental investigation of mode localization in electrostatically and mechanically coupled microbeam resonators
- (2020) Saad Ilyas et al. INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
- Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
- (2020) Toky Rabenimanana et al. APPLIED PHYSICS LETTERS
- Performances and improvement of coupled dual-microcantilevers in sensitivity
- (2019) Zhuojie Chen et al. SENSORS AND ACTUATORS A-PHYSICAL
- Duplex mode tilt measurements based on a MEMS biaxial resonant accelerometer
- (2019) Hong Ding et al. SENSORS AND ACTUATORS A-PHYSICAL
- Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
- (2019) Toky Rabenimanana et al. SENSORS AND ACTUATORS A-PHYSICAL
- Toward High-Resolution Inertial Sensors Employing Parametric Modulation in Coupled Micromechanical Resonators
- (2019) Chun Zhao et al. Physical Review Applied
- A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization
- (2019) Bo Peng et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Temperature-drift characterization of a micromachined resonant accelerometer with a low-noise frequency readout
- (2019) Zhengxiang Fang et al. SENSORS AND ACTUATORS A-PHYSICAL
- A mass sensor based on 3-DOF mode localized coupled resonator under atmospheric pressure
- (2018) Yuan Wang et al. SENSORS AND ACTUATORS A-PHYSICAL
- Nonlinear dynamics and parameter identification of electrostatically coupled resonators
- (2018) Lei Li et al. INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
- Investigation of modal interactions and their effects on the nonlinear dynamics of a periodic coupled pendulums chain
- (2017) Diala Bitar et al. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
- Highly Sensitive Flexible Printed Accelerometer System for Monitoring Vital Signs
- (2014) Yuanfeng Zhang et al. Soft Robotics
- Mode localization analysis and characterization in a 5-beam array of coupled nearly identical micromechanical resonators for ultra-sensitive mass detection and analyte identification
- (2012) Dong F. Wang et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Computational and quasi-analytical models for non-linear vibrations of resonant MEMS and NEMS sensors
- (2011) N. Kacem et al. INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
- A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit
- (2010) Claudia Comi et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Energy localization and white noise-induced enhancement of response in a micro-scale oscillator array
- (2010) S. Ramakrishnan et al. NONLINEAR DYNAMICS
- A high order purely frequency-based harmonic balance formulation for continuation of periodic solutions
- (2009) Bruno Cochelin et al. JOURNAL OF SOUND AND VIBRATION
- Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors
- (2009) N Kacem et al. NANOTECHNOLOGY
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