High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers
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Title
High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers
Authors
Keywords
High temperature, In, 2, O, 3, thin film, Thermal stability, Protective layer, Sublimation
Journal
CERAMICS INTERNATIONAL
Volume 47, Issue 20, Pages 28411-28418
Publisher
Elsevier BV
Online
2021-07-09
DOI
10.1016/j.ceramint.2021.06.258
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