Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

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Title
Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 16, Issue 2, Pages 375-382
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-09-23
DOI
10.1109/jsen.2015.2480842

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