Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

标题
Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays
作者
关键词
-
出版物
IEEE SENSORS JOURNAL
Volume 16, Issue 2, Pages 375-382
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2015-09-23
DOI
10.1109/jsen.2015.2480842

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