Fabrication of Thin-Film Silicon Membranes With Phononic Crystals for Thermal Conductivity Measurements

Published 2016 View Full Article

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Title
Fabrication of Thin-Film Silicon Membranes With Phononic Crystals for Thermal Conductivity Measurements
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 37, Issue 10, Pages 1358-1361
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-08-31
DOI
10.1109/led.2016.2600590

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