p-MOSFET and n-MOSFET prepared by ICP-assisted hot wire implantation doping technique

Title
p-MOSFET and n-MOSFET prepared by ICP-assisted hot wire implantation doping technique
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume -, Issue -, Pages 1-1
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-04-15
DOI
10.1109/led.2016.2554144

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