Influence of GaN/ZrO2 interfacial layer defects on 8-nm GaN-SOI-FinFET for reliable RFIC design

Title
Influence of GaN/ZrO2 interfacial layer defects on 8-nm GaN-SOI-FinFET for reliable RFIC design
Authors
Keywords
FinFET, GaN-SOI, GaN/ZrO, 2, Interfacial layer, Linearity, Reliability, SOI-FinFET
Journal
Publisher
Elsevier BV
Online
2021-11-24
DOI
10.1016/j.aeue.2021.154045

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