The Hidden Potential of Polysilsesquioxane for High‐ k : Analysis of the Origin of its Dielectric Nature and Practical Low‐Voltage‐Operating Applications beyond the Unit Device
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Title
The Hidden Potential of Polysilsesquioxane for High‐
k
: Analysis of the Origin of its Dielectric Nature and Practical Low‐Voltage‐Operating Applications beyond the Unit Device
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 32, Issue 7, Pages 2104030
Publisher
Wiley
Online
2021-10-21
DOI
10.1002/adfm.202104030
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