Selective areain situconversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide

Title
Selective areain situconversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 38, Pages 385106
Publisher
IOP Publishing
Online
2014-08-28
DOI
10.1088/0022-3727/47/38/385106

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