Journal
NANOMATERIALS
Volume 11, Issue 9, Pages -Publisher
MDPI
DOI: 10.3390/nano11092329
Keywords
EBL patterning; cryogenic etching process; stamp fabrication; UV-NIL patterning
Categories
Funding
- EEA [EEA-RO-NO2018-0438-ElastoMETA]
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This study focused on the design and manufacture of metasurface lenses optimized for focusing light with 1.55 mu m wavelength. The lenses were fabricated using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. While the simulated efficiency of the lens was 60%, the actual efficiency of the fabricated lenses was found to be lower due to rounding of the rectangular nanostructures during the pattern transfer processes.
This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 mu m wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. The designed metasurface makes use of the geometrical phase principle and consists of rectangular pillars with target dimensions of height h = 1200 nm, width w = 230 nm, length l = 354 nm and periodicity p = 835 nm. The simulated efficiency of the lens is 60%, while the master lenses obtained by using electron beam lithography are found to have an efficiency of 45%. The lenses subsequently fabricated via nanoimprint are characterized by an efficiency of 6%; the low efficiency is mainly attributed to the rounding of the rectangular nanostructures during the pattern transfer processes from the resist to silicon due to the presence of a thicker residual layer.
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