Multi-sized planar capacitive pressure sensor with ultra-high sensitivity
Published 2021 View Full Article
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Title
Multi-sized planar capacitive pressure sensor with ultra-high sensitivity
Authors
Keywords
Micro-sized sensor, Macro-sized sensor, Planar capacitive device, None dielectric layer, Ultra-high sensitivity
Journal
Nano Energy
Volume 87, Issue -, Pages 106178
Publisher
Elsevier BV
Online
2021-05-27
DOI
10.1016/j.nanoen.2021.106178
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