标题
Multi-sized planar capacitive pressure sensor with ultra-high sensitivity
作者
关键词
Micro-sized sensor, Macro-sized sensor, Planar capacitive device, None dielectric layer, Ultra-high sensitivity
出版物
Nano Energy
Volume 87, Issue -, Pages 106178
出版商
Elsevier BV
发表日期
2021-05-27
DOI
10.1016/j.nanoen.2021.106178
参考文献
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