Effect of substrate bias voltage on the mechanical properties of AlTiN/CrTiSiN multilayer hard coatings
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Title
Effect of substrate bias voltage on the mechanical properties of AlTiN/CrTiSiN multilayer hard coatings
Authors
Keywords
Hard coating, Mechanical, Multilayer, Residual stress, AlTiN
Journal
VACUUM
Volume 190, Issue -, Pages 110241
Publisher
Elsevier BV
Online
2021-05-01
DOI
10.1016/j.vacuum.2021.110241
References
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Related references
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