Deposition of nano-scaled CrTiAlN multilayer coatings with different negative bias voltage on Mg alloy by unbalanced magnetron sputtering

Published 2010 View Full Article

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Title
Deposition of nano-scaled CrTiAlN multilayer coatings with different negative bias voltage on Mg alloy by unbalanced magnetron sputtering
Authors
Keywords
-
Journal
VACUUM
Volume 84, Issue 7, Pages 962-968
Publisher
Elsevier BV
Online
2010-01-15
DOI
10.1016/j.vacuum.2010.01.028

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