Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor
出版年份 2021 全文链接
标题
Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor
作者
关键词
Low-temperature electrostatic adsorption, In-situ doping, Surface oxygen vacancy, Toluene sensor, MEMS fabrication technology
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 342, Issue -, Pages 129949
出版商
Elsevier BV
发表日期
2021-04-16
DOI
10.1016/j.snb.2021.129949
参考文献
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