Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges
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Title
Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 92, Issue 9, Pages 093504
Publisher
AIP Publishing
Online
2021-09-02
DOI
10.1063/5.0054851
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