Transition from ambipolar to free diffusion in an EUV-induced argon plasma
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Title
Transition from ambipolar to free diffusion in an EUV-induced argon plasma
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 10, Pages 103703
Publisher
AIP Publishing
Online
2020-03-10
DOI
10.1063/1.5142290
References
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- Comparison of H2and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
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- (2008) L. Couëdel et al. PHYSICS OF PLASMAS
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