Two-step maskless fabrication of compound fork-shaped gratings in nanomultilayer structures based on chalcogenide glasses
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Title
Two-step maskless fabrication of compound fork-shaped gratings in nanomultilayer structures based on chalcogenide glasses
Authors
Keywords
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Journal
OPTICS LETTERS
Volume 46, Issue 13, Pages 3037
Publisher
The Optical Society
Online
2021-06-03
DOI
10.1364/ol.427335
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