Two-step maskless fabrication of compound fork-shaped gratings in nanomultilayer structures based on chalcogenide glasses

标题
Two-step maskless fabrication of compound fork-shaped gratings in nanomultilayer structures based on chalcogenide glasses
作者
关键词
-
出版物
OPTICS LETTERS
Volume 46, Issue 13, Pages 3037
出版商
The Optical Society
发表日期
2021-06-03
DOI
10.1364/ol.427335

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