Investigation of optoelectrical and Schottky behavior of diamond-like carbon coating deposited by hollow cathode PACVD method
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Title
Investigation of optoelectrical and Schottky behavior of diamond-like carbon coating deposited by hollow cathode PACVD method
Authors
Keywords
Diamond-like carbon, Raman, Hollow cathode PACVD, Optical properties, Schottky junction, Au/DLC/p-Si, Electrical properties
Journal
OPTICAL MATERIALS
Volume 119, Issue -, Pages 111385
Publisher
Elsevier BV
Online
2021-07-20
DOI
10.1016/j.optmat.2021.111385
References
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