Investigation of the properties of diamond-like carbon thin films deposited by single and dual-mode plasma enhanced chemical vapor deposition

Published 2010 View Full Article

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Title
Investigation of the properties of diamond-like carbon thin films deposited by single and dual-mode plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 10, Pages 3090-3094
Publisher
Elsevier BV
Online
2010-12-26
DOI
10.1016/j.tsf.2010.12.154

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