Two-Dimensional Principal Component Analysis-Based Convolutional Autoencoder for Wafer Map Defect Detection

Published 2020 View Full Article

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Title
Two-Dimensional Principal Component Analysis-Based Convolutional Autoencoder for Wafer Map Defect Detection
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 68, Issue 9, Pages 8789-8797
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-08-07
DOI
10.1109/tie.2020.3013492

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