Identification of Ferroelectricity in a Capacitor With Ultra-Thin (1.5-nm) Hf0.5Zr0.5O2 Film

Published 2021 View Full Article

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Title
Identification of Ferroelectricity in a Capacitor With Ultra-Thin (1.5-nm) Hf0.5Zr0.5O2 Film
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 9, Pages 1303-1306
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-08-25
DOI
10.1109/led.2021.3097332

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