Fabrication and function examination of PZT-based MEMS accelerometers

Orientation transition, dielectric, and ferroelectric behaviors of sol-gel derived PZT thin films deposited on Ti–Pt alloy layers: A Ti content-dependent study

(2020) Xing Wang et al.   CERAMICS INTERNATIONAL

Design and fabrication of a D33-mode piezoelectric micro-accelerometer

(2019) Ma-hui Xu et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Microstructural comparison between precursor-based and particle-based PZT ceramic coatings

(2019) Maitane Gabilondo et al.   CERAMICS INTERNATIONAL

Effect of neodymium substitution on crystalline orientation, microstructure and electric properties of sol-gel derived PZT thin films

(2018) Qi Li et al.   CERAMICS INTERNATIONAL

Reliability testing of integrated low-temperature PVD PZT films

(2018) Daniel Monteiro Diniz Reis et al.   MICROELECTRONICS RELIABILITY

Controlled spalling and flexible integration of PZT film based on LaNiO3 buffer layer

(2018) Jing Zhang et al.   CERAMICS INTERNATIONAL

Study of Pb(Zr 0.52 Ti 0.48 )O 3 MEMS Piezoelectric Accelerometers for Health Monitoring of Mechanical Motors

(2018) Cheng‐Che Tsai et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Effect of electrode interfaces on peak-drift switching current of PZT thin films

(2018) Qicheng Zhang et al.   CERAMICS INTERNATIONAL

Effect of Gd doping on crystalline orientation, structural and electric properties of PZT thin films prepared by Sol-Gel methods

(2017) Wencai Xu et al.   INTEGRATED FERROELECTRICS

The effect of Mn/Nb doping on dielectric and ferroelectric properties of PZT thin films prepared by sol–gel process

(2015) Huajun Sun et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Dielectric and Piezoelectric Properties of PZT Composite Thick Films with Variable Solution to Powder Ratios

(2009) Dawei Wu et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Preparation of ferroelectric PZT thin films by plasma enhanced chemical vapor deposition using metalorganic precursors

(2007) Won Gyu Lee et al.   JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY

On the synthesis and crystallization process of nanocrystalline PZT powders obtained by a hybrid sol–gel alkoxides route

(2006) A. Suárez-Gómez et al.   JOURNAL OF ALLOYS AND COMPOUNDS