In-situ imidization analysis in microscale thin films of an ester-type photosensitive polyimide for microelectronic packaging applications

Title
In-situ imidization analysis in microscale thin films of an ester-type photosensitive polyimide for microelectronic packaging applications
Authors
Keywords
Photosensitive polyimide, In-situ ellipsometry, Thermal imidization, Low-temperature cure
Journal
EUROPEAN POLYMER JOURNAL
Volume 84, Issue -, Pages 279-291
Publisher
Elsevier BV
Online
2016-09-14
DOI
10.1016/j.eurpolymj.2016.09.020

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