In-situ imidization analysis in microscale thin films of an ester-type photosensitive polyimide for microelectronic packaging applications

出版年份 2016 全文链接

标题

作者

关键词

Photosensitive polyimide, In-situ ellipsometry, Thermal imidization, Low-temperature cure

出版物

Volume 84, Issue -, Pages 279-291

出版商

Elsevier BV

发表日期

2016-09-14

DOI

10.1016/j.eurpolymj.2016.09.020

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