Optimizing the plasma oxidation of aluminum gate electrodes for ultrathin gate oxides in organic transistors
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Title
Optimizing the plasma oxidation of aluminum gate electrodes for ultrathin gate oxides in organic transistors
Authors
Keywords
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Journal
Scientific Reports
Volume 11, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2021-03-19
DOI
10.1038/s41598-021-85517-7
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