Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath

Title
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2021-05-08
DOI
10.1088/1361-6595/abff0f

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