Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath

标题
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2021-05-08
DOI
10.1088/1361-6595/abff0f

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