Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic properties
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Title
Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic properties
Authors
Keywords
Al-doped ZnO, Cu thickness, Magnetron sputtering, Multilayer structure, Transparent conductive films, Optoelectronics properties
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 860, Issue -, Pages 158470
Publisher
Elsevier BV
Online
2020-12-25
DOI
10.1016/j.jallcom.2020.158470
References
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