Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic properties
出版年份 2020 全文链接
标题
Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic properties
作者
关键词
Al-doped ZnO, Cu thickness, Magnetron sputtering, Multilayer structure, Transparent conductive films, Optoelectronics properties
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 860, Issue -, Pages 158470
出版商
Elsevier BV
发表日期
2020-12-25
DOI
10.1016/j.jallcom.2020.158470
参考文献
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