Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam

Title
Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam
Authors
Keywords
Sapphire, non-diffraction Bessel beam, Femtosecond laser, Low surface roughness, Uniformity
Journal
OPTICS AND LASER TECHNOLOGY
Volume 135, Issue -, Pages 106713
Publisher
Elsevier BV
Online
2020-11-10
DOI
10.1016/j.optlastec.2020.106713

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