Enhancement in structural, optical and morphological properties of sprayed In2O3 thin films induced by low energy electron beam irradiation
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Title
Enhancement in structural, optical and morphological properties of sprayed In2O3 thin films induced by low energy electron beam irradiation
Authors
Keywords
Crystalline and amorphous In, 2, O, 3, thin films, Spray pyrolysis, Electron beam irradiation, Structural and optical properties, Photoluminescence
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 124, Issue -, Pages 105595
Publisher
Elsevier BV
Online
2020-12-04
DOI
10.1016/j.mssp.2020.105595
References
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