Enhancement in structural, optical and morphological properties of sprayed In2O3 thin films induced by low energy electron beam irradiation
出版年份 2020 全文链接
标题
Enhancement in structural, optical and morphological properties of sprayed In2O3 thin films induced by low energy electron beam irradiation
作者
关键词
Crystalline and amorphous In, 2, O, 3, thin films, Spray pyrolysis, Electron beam irradiation, Structural and optical properties, Photoluminescence
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 124, Issue -, Pages 105595
出版商
Elsevier BV
发表日期
2020-12-04
DOI
10.1016/j.mssp.2020.105595
参考文献
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