How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
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Title
How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 54, Issue 22, Pages 225304
Publisher
IOP Publishing
Online
2021-02-23
DOI
10.1088/1361-6463/abe89b
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