RF discharge diagnostics: Some problems and their resolution

On volt–ampere characteristic of symmetric CCP

(2020) Valery Godyak   PHYSICS OF PLASMAS

Electron kinetics in low-temperature plasmas

(2019) Vladimir Kolobov et al.   PHYSICS OF PLASMAS

Comments on plasma diagnostics with microwave probes

(2017) Valery Godyak   PHYSICS OF PLASMAS

Plasma density perturbation caused by probes at low gas pressure

(2017) Natalia Sternberg et al.   PHYSICS OF PLASMAS

Power measurements and coupler optimization in inductive discharges

(2017) V. A. Godyak et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

On modified finite difference method to obtain the electron energy distribution functions in Langmuir probes

(2016)   PHYSICS OF PLASMAS

Comparative analyses of plasma probe diagnostics techniques

(2015) V. A. Godyak et al.   JOURNAL OF APPLIED PHYSICS

Determination of Ar metastable atom densities in Ar and Ar/H2inductively coupled low-temperature plasmas

(2013) N Fox-Lyon et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

(2011) V A Godyak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electrical and plasma parameters of ICP with high coupling efficiency

(2011) V A Godyak   PLASMA SOURCES SCIENCE & TECHNOLOGY

Langmuir probes in RF plasma: surprising validity of OML theory

(2009) Francis F Chen   PLASMA SOURCES SCIENCE & TECHNOLOGY

Plasma parameters deduced from cylindrical probe measurements: determination of the electron density at the ion saturation current

(2008) J L Jauberteau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY