Electrical and plasma parameters of ICP with high coupling efficiency

Published 2011 View Full Article

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Title
Electrical and plasma parameters of ICP with high coupling efficiency
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 2, Pages 025004
Publisher
IOP Publishing
Online
2011-02-18
DOI
10.1088/0963-0252/20/2/025004
References
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