Influences of processing parameters on metal-bonded diamond wheel wear when grinding a sapphire wafer

Title
Influences of processing parameters on metal-bonded diamond wheel wear when grinding a sapphire wafer
Authors
Keywords
Grinding, Sapphire, Grinding wheel wear, Surface roughness
Journal
DIAMOND AND RELATED MATERIALS
Volume 113, Issue -, Pages 108275
Publisher
Elsevier BV
Online
2021-01-18
DOI
10.1016/j.diamond.2021.108275

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